By R. Azencott, Y. Guivarc'h, R. F. Gundy, P. L. Hennequin

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Because of the variety of functions performed in this laboratory, it is common to use two different types of wafer holding cassettes. 2, at two levels. The automated wafer handler, called the C2C, may pull a wafer from any of the 25 slots in the wafer cassette. In order to test for a possible positional effect, slot loading was included as a two-level factor, where the first level was to load the test wafers at the bottom of the cassette and the second level was to load the test wafers at the top of the cassette.

The format x* (LCL, UCL) is proposed as a way to repo measurements so that the relevant information is retained where 30 . x is the measured value, regardless of whether it is less than the detection limit (or even whether it is less than zero). An asterisk (*) indicates that the measurement is less than the detection limit. It would not appear for measurements greater than the detection limit. LCL is the lower 95% calibration limit for ;c. UCL is the upper 95% calibration limit for x. This allows the user of the measurement service to understand the quality of the measurements being reported to him.

And Graybill, Franklin A. Confidence Intervals on Variance Components. , 1992. This page intentionally left blank CHAPTER 2 PROMETRIX RS35e GAUGE STUDY IN FIVE TWO-LEVEL FACTORS AND ONE THREE-LEVEL FACTOR James Buckner, Barry L. Chin, and Jon Henri T he total measurement precision (variability) of a Prometrix RS35e automatic four- point prober tool was determined for two responses: wafer-to-wafer and within-wafer sheet resistance uniformity. Five two-level factors and one three-level factor were used.

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